Lineup
Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world’s largest plate size, bolstering the global manufacturing of crystalline displays.
FX-103SH/103S
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FX-103SH/103S leaflet (688KB)
| FX-103SH | FX-103S | |
|---|---|---|
| Resolution (L/S) | 2.2 µm (g+h+i-line) | 3.0 µm (g+h+i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 2,940 mm × 3,370 mm | |
| Takt time | 60 s/plate Conditions: 2,940 mm × 3,370 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
|
FX-88S
| Resolution (L/S) | 1.5 µm (i-line) |
|---|---|
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.40 µm |
| Plate size | 2,200 mm × 2,500 mm |
| Takt time | 47 s/plate Conditions: 2,200 mm × 2,500 mm, 4 scans, i-line, 30 mJ/cm2 |
FX-86SH2/86S2
| FX-86SH2 | FX-86S2 | |
|---|---|---|
| Resolution (L/S) | 2.2 µm (g+h+i-line) | 3.0 µm (g+h+i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 2,200 mm × 2,500 mm | |
| Takt time | 49 s/plate Conditions: 2,200 mm × 2,500 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
|
FX-6AS
| Resolution (L/S) | 1.2 µm (i-line) |
|---|---|
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.23 µm |
| Plate size | 1,500 mm × 1,850 mm |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
FX-68SH/68S
| FX-68SH | FX-68S | |
|---|---|---|
| Resolution (L/S) | 1.2 µm*1 (i-line) | 1.5 µm (i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.27 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
|
- *1When using a phase shift mask
FX-67S2/67S
| FX-67S2 | FX-67S | |
|---|---|---|
| Resolution (L/S) | 2.0 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 57 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
61 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-66S2/66S
| FX-66S2 | FX-66S | |
|---|---|---|
| Resolution (L/S) | 3.0 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.6 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 53 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
55 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
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